Nanometric position and displacement measurement of the six degrees of freedom by means of a patterned surface element.
Fiche publication
Date publication
mars 2005
Lien Pubmed
Résumé
A method is presented for position and displacement measurements of the six degrees of freedom by use of a patterned surface element observed by a static interferometric vision system. The surface element is made of a regular pattern of circular holes etched on a chromium layer deposited onto a flat glass plate. The in-plane coordinates (x, y, theta(z)) are reconstructed with a subpixel resolution by a vision method based on phase measurements. The out-of-plane coordinates (z, theta(x), theta(y)) are reconstructed by phase-shifting interferometry. Resolutions achieved by the proposed method are in the range of microradians for the measurement of angles and of nanometers for the position and displacement.
Référence
Appl Opt. 2005 Mar 10;44(8):1449-53.