Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction.

Fiche publication


Date publication

février 2014

Auteurs

Membres identifiés du Cancéropôle Est :
Pr HAEBERLE Olivier


Tous les auteurs :
Liu H, Bailleul J, Simon B, Debailleul M, Colicchio B, Haeberle O

Résumé

We have developed a tomographic diffractive microscope in reflection, which permits observation of sample surfaces with an improved lateral resolution, compared to a conventional holographic microscope. From the same set of data, high-precision measurements can be performed on the shape of the reflective surface by reconstructing the phase of the diffracted field. Doing so allows for several advantages compared to classical holographic interferometric measurements: improvement in lateral resolution, easier phase unwrapping, reduction of the coherent noise, combined with the high-longitudinal precision provided by interferometric phase measurements. We demonstrate these capabilities by imaging various test samples. (C) 2014 Optical Society of America

Référence

Appl Optics. 2014 Feb 1;53(4):748-55.