High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams.
Fiche publication
Date publication
novembre 2021
Journal
Materials (Basel, Switzerland)
Auteurs
Membres identifiés du Cancéropôle Est :
Dr FROEHLY Luc
Tous les auteurs :
Vetter C, Giust R, Furfaro L, Billet C, Froehly L, Courvoisier F
Lien Pubmed
Résumé
Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.
Mots clés
Bessel beam, glass, ultrafast laser processing
Référence
Materials (Basel). 2021 Nov 9;14(22):