Direct machining of curved trenches in silicon with femtosecond accelerating beams.
Fiche publication
Date publication
janvier 2013
Auteurs
Membres identifiés du Cancéropôle Est :
Dr FROEHLY Luc
Tous les auteurs :
Mathis A, Froehly L, Furfaro L, Jacquot M, Dudley JM, Courvoisier F
Lien Pubmed
Résumé
Control of the longitudinal profile of ablated structures during laser processing is a key technological requirement. We report here on the direct machining of trenches in silicon with circular profiles using femtosecond accelerating beams. We describe the ablation process based on an intensity threshold model, and show how the depth of the trenches can be predicted in the framework of a caustic description of the beam. [DOI: http://dx.doi.org/10.2971/jeos.2013.13019]
Référence
J Eur Opt Soc-rapid Publ. 2013;8:13019.